News
Film Thickness Measurement with High Spatial Resolution for Patterned and Multilayer Materials HORIBA Jobin Yvon has extended the performance capability of the UVISEL spectroscopic phase modulated ellipsometer with the integration of the VIP DUV Spectroscopic reflectometer. The combination of high precision ellipsometer and reflectometer measuring at the same sample position allows characterisation of features as small as 10 microns.
|