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Miniature multi-axis piezo stage has 0.05nm resolution Physik Instrumente have introduced a piezo driven nano-manipulation and scanning stage, the PicoCube, using parallel metrology closed loop control to achieve 50 picometre resolution in all axes.
Parallel metrology enables the PicoCube's capacitive sensors to detect all controlled degrees of freedom simultaneously and to compensate for any off-axis motion in real time. In addition, the technique also provides straighter multi-axis motion, improved reliability and a reduction in runout errors.
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