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Applied Materials' Vantage RadOx System Delivers 10X Oxide Reliability Applied Materials, Inc. introduces the Applied Vantage RadOx RTP system for depositing superior oxide films using a proven, high-productivity platform. The system's proprietary radical oxidation technology reduces device leakage by up to 10X over batch systems, while also demonstrating a 10x improvement in oxide reliability -- an important requirement for Flash memory chips. Key to the Vantage system's high productivity is its small-footprint, production-proven platform that addresses chipmakers' needs for reduced manufacturing costs.
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