News
Voltaix announces expanded production capacity for trimethylsilane (3MS) North Branch, NJ - Voltaix, Inc., a leading manufacturer of chemicals and gases for the semiconductor and photovoltaics industries, today announced that they have expanded production capacity for Ultra High Purity Trimethylsilane (3MS) to 25 tons annually. Plans are in place to further expand capacity to 75 tpy.
3MS is used by integrated circuit manufacturers for depositing low-k thin-film dielectric layers, such as carbon-doped silicate glass films, by plasma-enhanced CVD.
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